Intrinsic Measures | APAC

Various safety measures are applied to manufacturing equipment of semiconductor production processes using dangerous chemicals and gases. Nonetheless, as you may know, these measures have not been able to completely eliminate the risk of explosion at semiconductor manufacturing sites.

Various highly flammable gases such as hydrogen, propane and arsine are used in manufacturing semiconductors. A conventionally used measure to prevent explosion is to eliminate arc generation, which is one aspect of gas discharge, when equipment is charged with nitrogen. Although some may believe that this is a sufficient safety measure, measures such as these cannot be said to thoroughly prevent explosion. To understand why, it is necessary to realize that even if using the conventional method of charging with gas, there is still a possibility of an explosive atmosphere being created if a machine charged with nitrogen suffers a malfunction, such that the risk of explosion is not completely eliminated. The question then is, what are proper explosion-proof measures to apply to semiconductor manufacturing sites?
 

Intrinsically safe explosion-proof measures are required for thoroughly eliminating the risk of explosion
The three requirements for an explosion to occur are "Flammable gas", "Combustion-supporting gas (oxygen)" and an "Ignition source". In other words, we can intrinsically prevent explosion if we are able to completely eliminate just one of these requirements. As it is difficult to completely eliminate "Combustion-supporting gas (oxygen)" in semiconductor manufacturing sites, eliminating any "Ignition source" is the most realistic method. With our 70 years of experience in research and development of explosion-proof technology, IDEC recommends our barrier relays with "Intrinsically safe explosion-proof structure" that function using an extremely weak current at a level that does not cause ignition.
Ignition sources inside equipment used in explosive environments generally consist of the wiring that transmits information from sensors and safety switches to a controller. However, reducing the current or voltage applied to the wiring so that it is less than a certain size can intrinsically prevent explosion. IDEC barriers take the extremely weak signal received from a dangerous area in an explosive environment and amplifies it in a non-dangerous area so that information can be transmitted to the controller with no possible source of an explosion.

Our expansive lineup of products and wide variety of proven results provide generous support for explosion-proof measures
Our products with an intrinsically safe explosion-proof structure provide compact and lightweight portfolio at lower cost in comparison with other explosion-proof products. Additionally, our products are compatible with digital and analog input/output, making it easy to plan and design sensors, switches and other devices installed in dangerous areas. At IDEC, we have a long history of proven results in supporting explosion-proof measures, so please feel free to contact us for advice regarding recommendations of the proper devices, and corresponding planning and designing Be sure to consult with IDEC for the prevention of explosions that could cause great damage.